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Abstract:
The sensor elements based on GaN high electron mobility transistor (HEMT) have considerable advantages on sensitivity, response speed, detection surface, and harsh environment adaptability because of the features of HEMT, such as high 2DEG density at the hetero-interface, wide band gap, high breakdown voltage, stable chemical properties, and high electron mobility. In this paper, the structures, mechanism, progress of work, advantages and disadvantages about the two mature types of sensors developed from GaN-based HEMT basic structure are discussed and summarized firstly. Then, the latest progress on three kinds of nevel GaN-based HEMT sensors is reviewed in detail focusing on the device material and the optimization of gate structure and material. Among them, GaN-based HEMT photodetector is highlighted in the aspects of the material system, key process, detector structure, principle and new mechanisms. Finally, the future direction for the development of GaN-based HEMT sensor elements is explored. © 2016, Science Press. All right reserved.
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Chinese Journal of Luminescence
ISSN: 1000-7032
Year: 2016
Issue: 12
Volume: 37
Page: 1545-1553
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count: 4
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 7
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