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Author:

Zhang, Jiabao (Zhang, Jiabao.) | Yang, Xudong (Yang, Xudong.) | Li, Zhipeng (Li, Zhipeng.) | Cai, Jixiang (Cai, Jixiang.) | Zhang, Jianfei (Zhang, Jianfei.) | Han, Xiaodong (Han, Xiaodong.) (Scholars:韩晓东)

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EI Scopus SCIE

Abstract:

Focused ion beam (FIB) has been adopted extensively for transmission electron microscope (TEM) sample preparation during the past decades. However, ion beam- and deposition-induced damage during transferring and mounting of the sample cannot be effectively avoided, limiting the application of FIB in ion-beam illumination-sensitive samples. A transferring device called the FIB shield is designed and fabricated to greatly reduce the damage and contamination of the sample during transfer and mounting under Ga+ beam imaging, milling and Pt deposition. Nearly damage-free transfer and precise positioning and attachment of beam-sensitive in situ TEM nanoindentation samples are achieved. The effectiveness of the shielding plate to block Ga+ radiation damage during Ga+ beam imaging and milling and that of the buffer region to alleviate sputtering damage during Pt deposition are verified by corresponding experiments.

Keyword:

FIB TEM sample preparation Pt contamination FIB-shield Ga+ damage

Author Community:

  • [ 1 ] [Zhang, Jiabao]Beijing Univ Technol, Beijing Key Lab Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 2 ] [Yang, Xudong]Beijing Univ Technol, Beijing Key Lab Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 3 ] [Li, Zhipeng]Beijing Univ Technol, Beijing Key Lab Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 4 ] [Cai, Jixiang]Beijing Univ Technol, Beijing Key Lab Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 5 ] [Zhang, Jianfei]Beijing Univ Technol, Beijing Key Lab Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 6 ] [Han, Xiaodong]Beijing Univ Technol, Beijing Key Lab Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 7 ] [Yang, Xudong]Beijing Univ Technol, Coll Elect Informat & Control Engn, Beijing, Peoples R China
  • [ 8 ] [Li, Zhipeng]Bestron Beijing Sci & Technol Co Ltd, Beijing 102600, Peoples R China
  • [ 9 ] [Cai, Jixiang]Bestron Beijing Sci & Technol Co Ltd, Beijing 102600, Peoples R China

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Source :

PHYSICA SCRIPTA

ISSN: 0031-8949

Year: 2023

Issue: 12

Volume: 98

2 . 9 0 0

JCR@2022

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 10

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