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Abstract:
Focused ion beam (FIB) has been adopted extensively for transmission electron microscope (TEM) sample preparation during the past decades. However, ion beam- and deposition-induced damage during transferring and mounting of the sample cannot be effectively avoided, limiting the application of FIB in ion-beam illumination-sensitive samples. A transferring device called the FIB shield is designed and fabricated to greatly reduce the damage and contamination of the sample during transfer and mounting under Ga+ beam imaging, milling and Pt deposition. Nearly damage-free transfer and precise positioning and attachment of beam-sensitive in situ TEM nanoindentation samples are achieved. The effectiveness of the shielding plate to block Ga+ radiation damage during Ga+ beam imaging and milling and that of the buffer region to alleviate sputtering damage during Pt deposition are verified by corresponding experiments.
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PHYSICA SCRIPTA
ISSN: 0031-8949
Year: 2023
Issue: 12
Volume: 98
2 . 9 0 0
JCR@2022
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 10
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