Optical　biosensors　provide　important　opportunities　and　have　broad　application　prospects　in　biomedicine,　disease　diagnosis,　pharmaceutical,　and　other　fields.　In　this　paper,　a　reusable　VCSEL　(vertical　cavity　surface　emitting　laser)　biosensor　chip　integrated　with　a　multilayer　nano　grating　structure　is　introduced.　The　selected　laser　wavelength　is　850　nm,　and　the　overall　device　adopts　semiconductor　laser　packaging　technology　to　achieve　high　integration　of　light　source　and　multilayer　nano　grating.　A　small　plasmonic　biosensor　platform　based　on　hyperbolic　metamaterial　(HMMs)　Au/Si3N4　is　studied　using　the　grating　coupling　principle.　The　transmission　peak　is　adjusted　to　the　wavelength　of　850　nm　by　changing　the　nano　grating　parameters　so　as　to　improve　the　sensitivity　of　the　sensor　chip.　However,　the　high　cost　of　the　sensor　chip　which　is　based　on　noble　metal　nanostructure　and　precision　technology　hinders　its　further　application.　In　this　paper,　we　propose　to　grow　and　remove　parylene　film　on　the　sensor　chip　to　realize　the　reuse　of　biosensors.　　©　2024　SPIE.