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Author:

Sang, L. (Sang, L..) | Jin, R. (Jin, R..) | Cui, J. (Cui, J..) | Niu, X. (Niu, X..) | Li, Z. (Li, Z..) | Yang, J. (Yang, J..) | Nuo, M. (Nuo, M..) | Zhang, M. (Zhang, M..) | Wang, M. (Wang, M..) | Wei, J. (Wei, J..)

Indexed by:

Scopus SCIE

Abstract:

A SiC fin-channel MOSFET structure (Fin-MOS) is proposed for an enhanced gate shielding effect. The gates are placed on each side of the narrow fin-channel region, while grounded p-shield regions below the gates provide a strong shielding effect. The device is investigated using Sentaurus TCAD. For a narrow fin-channel region, there is difficulty in forming an Ohmic contact to the p-base; a floating p-base might potentially store negative charges upon high drain voltage, and, thus, causes threshold voltage instabilities. The simulation reveals that, for a fin-width of 0.2 μm, the p-shield regions provide a stringent shielding effect against high drain voltage, and the dynamic threshold voltage shift (∆Vth) is negligible. Compared to conventional trench MOSFET (Trench-MOS) and asymmetric trench MOSFET (Asym-MOS), the proposed Fin-MOS boasts the lowest OFF-state oxide field and reverse transfer capacitance (Crss), while maintaining a similar low ON-resistance. © 2024 by the authors.

Keyword:

dynamic threshold voltage SiC MOSFET gate shielding effect fin-channel

Author Community:

  • [ 1 ] [Sang L.]Beijing Institute of Smart Energy, Beijing, 102209, China
  • [ 2 ] [Sang L.]Beijing Huairou Laboratory, Beijing, 101409, China
  • [ 3 ] [Jin R.]Beijing Institute of Smart Energy, Beijing, 102209, China
  • [ 4 ] [Jin R.]Beijing Huairou Laboratory, Beijing, 101409, China
  • [ 5 ] [Cui J.]The School of Integrated Circuits, Peking University, Beijing, 100871, China
  • [ 6 ] [Niu X.]Beijing Institute of Smart Energy, Beijing, 102209, China
  • [ 7 ] [Niu X.]Beijing Huairou Laboratory, Beijing, 101409, China
  • [ 8 ] [Li Z.]Beijing Institute of Smart Energy, Beijing, 102209, China
  • [ 9 ] [Li Z.]Beijing Huairou Laboratory, Beijing, 101409, China
  • [ 10 ] [Yang J.]The School of Integrated Circuits, Peking University, Beijing, 100871, China
  • [ 11 ] [Nuo M.]The School of Integrated Circuits, Peking University, Beijing, 100871, China
  • [ 12 ] [Zhang M.]The College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 13 ] [Wang M.]The School of Integrated Circuits, Peking University, Beijing, 100871, China
  • [ 14 ] [Wei J.]The School of Integrated Circuits, Peking University, Beijing, 100871, China

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Source :

Electronics (Switzerland)

ISSN: 2079-9292

Year: 2024

Issue: 9

Volume: 13

2 . 9 0 0

JCR@2022

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 1

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 6

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