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Author:

Shi, Yiming (Shi, Yiming.) | Meng, Junhua (Meng, Junhua.) (Scholars:孟军华) | Xia, Zhengchang (Xia, Zhengchang.) | Huang, Jidong (Huang, Jidong.) | Liu, Wenkang (Liu, Wenkang.) | Jiang, Ji (Jiang, Ji.) | Yin, Zhigang (Yin, Zhigang.) | Deng, Jinxiang (Deng, Jinxiang.) | Zhang, Xingwang (Zhang, Xingwang.)

Indexed by:

EI Scopus SCIE

Abstract:

Integrating monoclinic gallium oxide (R-Ga2O3) with two-dimensional (2D) hexagonal boron nitride (h-BN) into heterostructures is of significant importance for achieving high- power device applications. The 2D-material-assisted epitaxy provides a straightforward integration method for fabricating R-Ga2O3/h-BN vertical heterostructures. In this work, the R-Ga2O3 films were deposited on both polycrystalline and single-crystalline h-BN layers with different thicknesses, and two growth modes of R-Ga2O3 films on h-BN, remote epitaxy, and van der Waals (vdW) epitaxy, were investigated. The results show that the potential of the sapphire substrate can penetrate the monolayer and bilayer h-BN to obtain the remote epitaxy of R-Ga2O3 films, regardless of the crystallinity of h-BN. The vdW epitaxy of R-Ga2O3 film can be realized on the monocrystalline h-BN substrate. Compared with the conventional and remote epitaxial R-Ga2O3 films on sapphire substrate, the vdW epitaxial R-Ga2O3 films on the single- crystalline h-BN substrate exhibit higher crystallinity. This work indicates that the 2D-material-assisted epitaxy provides a feasible scheme for the heterogeneous integration of R-Ga2O3 films.

Keyword:

van der Waals epitaxy h-BN remote epitaxy heterostructures

Author Community:

  • [ 1 ] [Shi, Yiming]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 2 ] [Meng, Junhua]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 3 ] [Liu, Wenkang]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 4 ] [Deng, Jinxiang]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 5 ] [Shi, Yiming]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 6 ] [Xia, Zhengchang]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 7 ] [Huang, Jidong]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 8 ] [Jiang, Ji]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 9 ] [Yin, Zhigang]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 10 ] [Zhang, Xingwang]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 11 ] [Xia, Zhengchang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 12 ] [Huang, Jidong]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 13 ] [Jiang, Ji]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 14 ] [Yin, Zhigang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 15 ] [Zhang, Xingwang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China

Reprint Author's Address:

  • 孟军华

    [Meng, Junhua]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China;;[Zhang, Xingwang]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China;;[Zhang, Xingwang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China

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Source :

NANO RESEARCH

ISSN: 1998-0124

Year: 2025

Issue: 2

Volume: 18

9 . 9 0 0

JCR@2022

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 8

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