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Integrating monoclinic gallium oxide (R-Ga2O3) with two-dimensional (2D) hexagonal boron nitride (h-BN) into heterostructures is of significant importance for achieving high- power device applications. The 2D-material-assisted epitaxy provides a straightforward integration method for fabricating R-Ga2O3/h-BN vertical heterostructures. In this work, the R-Ga2O3 films were deposited on both polycrystalline and single-crystalline h-BN layers with different thicknesses, and two growth modes of R-Ga2O3 films on h-BN, remote epitaxy, and van der Waals (vdW) epitaxy, were investigated. The results show that the potential of the sapphire substrate can penetrate the monolayer and bilayer h-BN to obtain the remote epitaxy of R-Ga2O3 films, regardless of the crystallinity of h-BN. The vdW epitaxy of R-Ga2O3 film can be realized on the monocrystalline h-BN substrate. Compared with the conventional and remote epitaxial R-Ga2O3 films on sapphire substrate, the vdW epitaxial R-Ga2O3 films on the single- crystalline h-BN substrate exhibit higher crystallinity. This work indicates that the 2D-material-assisted epitaxy provides a feasible scheme for the heterogeneous integration of R-Ga2O3 films.
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NANO RESEARCH
ISSN: 1998-0124
Year: 2025
Issue: 2
Volume: 18
9 . 9 0 0
JCR@2022
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SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 8
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