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Laser-induced plasma during the laser lift-off (LLO) process has complex dynamic driving evolution behaviour, presenting a challenge in achieving non-destructive μ-LED transfer. This study systematically explores the mechanism of homogeneous mechanical effect by confined plasma superfluid reflection for lossless μ-LEDs transfer. The stress field distribution of μ-LEDs subjected to the transfer process is simulated from the transferred μ-LED crack morphology, confirming that the non-uniform stress concentration points caused by the plasma evolution process are the main cause of μ-LED breakage. The confined plasma is modelled using the Fock-Plank electron density theory combined with the electrostatic sphere shell model and real-time ICCD imaging, resulting in the characteristic law of the plasma in a confined region over time. The results show that the plasma expansion velocity and the geometry of the interface cavity can be synchronously adjusted by modulating the laser irradiation behaviour, thus realizing its critical Mach number to achieve the plasma conversion from regular reflection to Mach reflection. Based on modulating of superfluid reflection effect, the plasma stress field is effectively homogenized, inducing a damage-free transfer of μ-LEDs. This study provides a novel understanding of plasma dynamics in the picosecond laser transfer process and lays the groundwork for achieving high-quality, non-destructive μ-LED transfers. © 2025 Elsevier B.V.
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Applied Surface Science
ISSN: 0169-4332
Year: 2025
Volume: 690
6 . 7 0 0
JCR@2022
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 10
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