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Author:

Feng, Yuxia (Feng, Yuxia.) | Mei, Wenkang (Mei, Wenkang.) | Zhang, Chen (Zhang, Chen.) | Wu, Junkang (Wu, Junkang.) | Wang, Qinghe (Wang, Qinghe.) | Yang, Yufei (Yang, Yufei.) | Hu, Liangchen (Hu, Liangchen.) | Ma, Tengxuan (Ma, Tengxuan.) | Zhang, Xun (Zhang, Xun.) | Zhang, Guoju (Zhang, Guoju.) | Yang, Hongcai (Yang, Hongcai.) | Yang, Xuelin (Yang, Xuelin.) | Liu, Kaihui (Liu, Kaihui.) | Xu, Chen (Xu, Chen.) | Shen, Bo (Shen, Bo.)

Indexed by:

EI Scopus SCIE

Abstract:

Freestanding gallium nitride (GaN) membranes can extend the applications of GaN to more functional devices through heterogeneous integration. Two-dimensional (2D) materials provide a versatile platform for the preparation of a freestanding ultrathin membrane. However, fabrication of a freestanding GaN membrane with the aid of 2D materials presents a challenge at the GaN/2D interface: keeping strong epitaxial interactions for epitaxy while contrarily ensuring weak interactions for intact exfoliation. Here, an approach for achieving a freestanding GaN membrane is demonstrated via epitaxy of GaN on chemical vapor deposition (CVD)-grown nearly single-crystalline bilayer graphene/sapphire, followed by intact exfoliation. Single-crystalline GaN is realized by inheriting the lattice orientation of graphene in a quasi-van der Waals epitaxy mode and modulating the growth kinetics of III-nitrides. Subsequently, controllable exfoliation is realized at the bilayer graphene interface by adjusting the interface adhesion. The achieved freestanding GaN membrane maintains a high quality comparable to that of GaN on a rigid substrate. This work offers a promising strategy for the fabrication of a high-quality freestanding GaN membrane for diverse device applications.

Keyword:

GaN bilayer graphene interface freestanding membrane lattice inheriting exfoliation nearly single-crystallinegraphene

Author Community:

  • [ 1 ] [Feng, Yuxia]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 2 ] [Mei, Wenkang]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 3 ] [Zhang, Chen]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 4 ] [Yang, Yufei]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 5 ] [Hu, Liangchen]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 6 ] [Ma, Tengxuan]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 7 ] [Zhang, Xun]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 8 ] [Zhang, Guoju]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 9 ] [Xu, Chen]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 10 ] [Wu, Junkang]Peking Univ, Sch Phys, Beijing 100871, Peoples R China
  • [ 11 ] [Wang, Qinghe]Peking Univ, Sch Phys, Beijing 100871, Peoples R China
  • [ 12 ] [Yang, Hongcai]Peking Univ, Sch Phys, Beijing 100871, Peoples R China
  • [ 13 ] [Yang, Xuelin]Peking Univ, Sch Phys, Beijing 100871, Peoples R China
  • [ 14 ] [Liu, Kaihui]Peking Univ, Sch Phys, Beijing 100871, Peoples R China
  • [ 15 ] [Shen, Bo]Peking Univ, Sch Phys, Beijing 100871, Peoples R China

Reprint Author's Address:

  • [Feng, Yuxia]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China;;[Yang, Xuelin]Peking Univ, Sch Phys, Beijing 100871, Peoples R China;;[Shen, Bo]Peking Univ, Sch Phys, Beijing 100871, Peoples R China

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Source :

ACS APPLIED ELECTRONIC MATERIALS

Year: 2025

Issue: 5

Volume: 7

Page: 2057-2064

4 . 7 0 0

JCR@2022

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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