Pull-in parameters of contact electrostatic microswitches using equilibrium stability analysis - Details

Author：

Li, Hao-Qun (Li, Hao-Qun.) | Zhang, Zhi-Jie (Zhang, Zhi-Jie.) | Chen, Li-Hua (Chen, Li-Hua.) | Fan, Jin-Hong (Fan, Jin-Hong.)

Indexed by：

EI Scopus

Abstract：

Pull-in　parameters　analysis,　such　as　pull-in　voltage　and　pull-in　displacement,　of　contact　type　electrostatically　actuated　MEMS　switches　is　investigated.　Using　Euler-Bernoulli　beam　theory,　a　cantilever　beam　model　is　established.　Based　on　the　method　of　Galerkin　decomposition,　the　model　is　changed　to　a　discrete　modal　equations,　including　nonlinear　electrostatic　force.　Based　on　the　equilibrium　stability　analysis,　pull-in　voltage　and　pull-in　displacement　are　discussed.　The　simulation　results　can　be　used　as　design　tools　and　rules　to　improve　switch　performance.　©　2011　Springer-Verlag　Berlin　Heidelberg.

Keyword：

Nonlinear equations Electrostatic actuators Continuum mechanics Electrostatics

Author Community：

[ 1 ] [Li, Hao-Qun]College of Mechanical Engineering, Beijing University of Technology, Beijing, China
[ 2 ] [Zhang, Zhi-Jie]College of Mechanical Engineering, Beijing University of Technology, Beijing, China
[ 3 ] [Chen, Li-Hua]College of Mechanical Engineering, Beijing University of Technology, Beijing, China
[ 4 ] [Fan, Jin-Hong]College of Mechanical Engineering, Beijing University of Technology, Beijing, China