PMMA microlens array preparation using carbon dioxide laser - Details

Author：

Li, Xiaogang (Li, Xiaogang.) | Chen, Jimin (Chen, Jimin.) (Scholars：陈继民) | Liu, Furong (Liu, Furong.) (Scholars：刘富荣) | Li, Xiaoyu (Li, Xiaoyu.) | Zhang, Qiang (Zhang, Qiang.)

Indexed by：

EI Scopus PKU CSCD

Abstract：

The　experiment　developed　a　novel　method　of　microlens　array　preparation　on　polymethyl　methacrylate　(PMMA),　which　can　fabricate　the　microlens　with　smooth　surface,　and　the　radius　of　curvature　and　size　of　lens　could　be　controled　by　changing　laser　machining　parameters.　Laser　irradiation　induced　glass　evaporation　and　vaporization,　so　the　liquid　glass　surface　tranformed　to　sphere　shape　with　the　effect　of　surface　tension.　A　microlens　formed　after　the　surrounded　liquid　glass　cooling　down.　The　lens　radius　of　curvature　could　be　minished　with　the　laser　output　enhanced.　But　when　the　PMMA　was　impure　or　dirty,　the　microlens　were　bad　with　airballes　and　failure　points.

Keyword：

Polymethyl methacrylates Etching Microlenses Carbon dioxide lasers Glass Optical instrument lenses Optical devices

Author Community：

[ 1 ] [Li, Xiaogang]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
[ 2 ] [Chen, Jimin]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
[ 3 ] [Liu, Furong]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
[ 4 ] [Li, Xiaoyu]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
[ 5 ] [Zhang, Qiang]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China