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Abstract:
Excessive phosphine is needed to get enough V/III ratio during common growth process of AlGaInP material by MOCVD in order to get crystal structure with high quality. AlGaInP was deposited by LP-MOCVD system with different phosphine flows (1000 ml/min and 400 ml/min, corresponding V/III ratios were 723 and 289), and the result was investigated by means of MOCVD in-situ software, double crystal X-ray diffraction system, photoluminescence (PL) and so on. It was observed that V/III ratio affects not only the growth rate of AlGaInP but also the crystal lattice mismatch between epitaxial material and GaAs substrate as well as optical properties of AlGalnP.
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Semiconductor Optoelectronics
ISSN: 1001-5868
Year: 2007
Issue: 2
Volume: 28
Page: 202-204
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
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Chinese Cited Count:
30 Days PV: 9
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