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Author:

Ma, Jie (Ma, Jie.) | Zhang, Hao-Dong (Zhang, Hao-Dong.) | Bi, An-Yuan (Bi, An-Yuan.) | Wang, Cong-Zeng (Wang, Cong-Zeng.) | Zhou, Mei-Ling (Zhou, Mei-Ling.)

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EI Scopus PKU CSCD

Abstract:

Using WF6 and H2 as precursors, many kinds of dense shaped tungsten products were successfully developed by chemical vapor deposition. The results show that the deposit is of high purity (>99.8%) and high density (>19.2 g/cm3). The microstructure of deposit is columnar crystal with preferential growth in the direction of (200). The deposition rate can be 2-3 mm/h. The application of chemical vapor deposition method in preparing shaped tungsten product possesses a bright future due to simple equipment, reliable process and the product of high quality.

Keyword:

Synthesis (chemical) Crystals Microstructure Reliability Quality control Density (specific gravity) Tungsten Chemical vapor deposition

Author Community:

  • [ 1 ] [Ma, Jie]Key Laboratory of Advanced Functional Materials, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Zhang, Hao-Dong]Key Laboratory of Advanced Functional Materials, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [Bi, An-Yuan]Key Laboratory of Advanced Functional Materials, Beijing University of Technology, Beijing 100022, China
  • [ 4 ] [Wang, Cong-Zeng]Key Laboratory of Advanced Functional Materials, Beijing University of Technology, Beijing 100022, China
  • [ 5 ] [Zhou, Mei-Ling]Key Laboratory of Advanced Functional Materials, Beijing University of Technology, Beijing 100022, China

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Source :

Acta Armamentarii

ISSN: 1000-1093

Year: 2006

Issue: 2

Volume: 27

Page: 315-319

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 12

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