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Abstract:
Using WF6 and H2 as precursors, many kinds of dense shaped tungsten products were successfully developed by chemical vapor deposition. The results show that the deposit is of high purity (>99.8%) and high density (>19.2 g/cm3). The microstructure of deposit is columnar crystal with preferential growth in the direction of (200). The deposition rate can be 2-3 mm/h. The application of chemical vapor deposition method in preparing shaped tungsten product possesses a bright future due to simple equipment, reliable process and the product of high quality.
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Acta Armamentarii
ISSN: 1000-1093
Year: 2006
Issue: 2
Volume: 27
Page: 315-319
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SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 12
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