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Abstract：
Three preparation processes of TiNi SMA thin film were summarized and the pulsed laser deposition was emphasized. The applications of TiNi SMA Thin Films as micro-actuation devices in micro-fluid control system and micro-operation system were introduced. With the development of thin film preparation process and research on its performance, SMA thin films would be more widely applied in composite smart material/structure and design/manufacture of MEMS actuation and sensor devices.
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Microfabrication Technology
ISSN： 1003-8213
Year： 2005
Issue： 3
Page： 1-8
Cited Count：
WoS CC Cited Count： 0
SCOPUS Cited Count：
ESI Highly Cited Papers on the List： 0 Unfold All
WanFang Cited Count：
Chinese Cited Count：
30 Days PV： 5
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