This　paper　presents　the　principle　and　method　of　chemical　vapor　depositing　molybdenum.　Molybdenum　coating　is　deposited　on　copper　substrates　from　the　mixture　of　MoF6　and　H2.　The　microstructures　and　microhardness　of　the　deposits　are　analyzed.　The　results　show　that　the　microstructures　change　with　the　variation　of　deposition　temperature.　The　microstructures　of　deposited　layer　present　a　fine　grains　multilayered　structure　with　a　microhardness　as　high　as　677　HV　at　relatively　low　deposition　temperatures,　while　a　compact　columnar　crystals　microstructure　is　obtained　at　higher　deposition　temperatures.