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Author:

Yan, Ruixuan (Yan, Ruixuan.) | Wei, Xianglei (Wei, Xianglei.) | He, Chunhua (He, Chunhua.) | Zhao, Qiancheng (Zhao, Qiancheng.) | Yang, Zhenchuan (Yang, Zhenchuan.) | Yan, Guizhen (Yan, Guizhen.)

Indexed by:

EI Scopus

Abstract:

In this paper, the influence of MEMS gyroscope's tuning voltage on its resonant frequency is investigated analytically and experimentally. The theoretical deduction shows that, with the increase of the tuning voltage, the frequency of drive mode is constant due to area-changing electrostatic driving scheme, while the square of the frequency of the sense mode is linearly dependent on the square of the tuning voltage due to the gap-changing electrostatic sensing scheme. Experimental results demonstrate good agreement with the theoretical analysis. Furthermore, the frequency of sense mode is affected by the structure and fabrication process of MEMS gyroscopes. © 2015 IEEE.

Keyword:

Tuning Electrostatics Natural frequencies Gyroscopes

Author Community:

  • [ 1 ] [Yan, Ruixuan]College of Electronic Information and Control Engineering, Beijing University of Technology. Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 2 ] [Wei, Xianglei]National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 3 ] [He, Chunhua]National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 4 ] [Zhao, Qiancheng]National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 5 ] [Yang, Zhenchuan]National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 6 ] [Yan, Guizhen]National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing; 100871, China

Reprint Author's Address:

  • [yang, zhenchuan]national key laboratory of science and technology on micro/nano fabrication, institute of microelectronics, peking university, beijing; 100871, china

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Source :

Year: 2015

Page: 435-437

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count: 1

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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