AlGaInP thin-film LED with ITO omni-directional reflector - Details

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Abstract：

Four　kinds　of　thin-film　light　emitting　diodes　(LEDs),　with　different　metal　reflectors　and　different　thickness　indium　tin　oxide　(ITO)　layers,　were　fabricated　from　the　same　AlGaInP/GaAs　epitaxial　layer.　For　comparison,　three　kinds　of　LEDs　have　the　same　ITO/AuZnAu　reflector,　but　have　different　thickness　of　ITO　film　65,　90　and　270nm,　respectively.　The　device　with　65nm　ITO　film　provides　the　best　luminous　intensity-current　(L-I)　and　injection　current-forward　voltage　(I-V)　performance,　which　has　the　luminous　intensity　of　149.2　mcd　(@20mA)　and　the　forward　voltage　of　2.15v　(@20mA).　In　addition,　two　kinds　of　LEDs　have　the　same　90nm　ITO　layer,　but　have　different　reflector　ITO/AuZnAu　and　ITO/Au,　respectively.　The　LED　with　ITO/AuZnAu　reflector　has　better　optical　and　electrical　properties.　The　possible　reason　may　be　the　diffusion　of　Zn　content　into　the　ITO　layer　and　GaP　layer.　The　influences　of　Zn　content　and　the　thickness　of　ITO　film　to　the　optical　and　electrical　properties　of　the　LEDs　are　discussed　in　this　paper.　©　2011　IEEE.

Keyword：

Indium alloys Gallium phosphide III-V semiconductors Film thickness Thin films Aluminum alloys Light emitting diodes Remote sensing Zinc Semiconductor alloys Reflection Optical films Tin oxides

Author Community：

[ 1 ] [Yan, Weiwei]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing 100124, China
[ 2 ] [Guo, Weiling]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing 100124, China
[ 3 ] [Cui, Bifeng]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing 100124, China
[ 4 ] [Gao, Wei]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing 100124, China
[ 5 ] [Yin, Fei]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing 100124, China
[ 6 ] [Cui, Desheng]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing 100124, China