The　armature　fabricated　with　the　sacrificial　layer　techniques　is　an　important　part　of　micro　electromagnetic　relay.　So　the　sacrificial　layer　is　one　of　the　key　fabrication　processes　in　the　realization　of　prototype　of　micro　electromagnetic　relay.　In　this　paper　several　sacrificial　layers　including　Copper,　Polyimide　and　Positive　photoresist　are　studied　based　on　the　investigation　of　the　research　on　sacrificial　layer　and　binding　the　characteristic　of　micro　electromagnetic　relay＇s　fabrication　process.　©　2009　Trans　Tech　Publications,　Switzerland.