Indexed by：
Abstract：
In this paper, we introduce a compact measuring system, to analyze microstructure force property. The system is specially designed in which a mechanical test machine, a PCB board based on an USB connection for device driving and data collection, and processing software were contained. This system can be used for measuring deformation characteristics of MEMS structures by bending method. To confirm the feasibility of the system, an experiment was performed on a micro pillar. © 2008 IEEE.
Keyword：
Reprint Author's Address：
Email：
Source ：
Year： 2008
Page： 5-8
Language： English
Cited Count：
WoS CC Cited Count： 0
SCOPUS Cited Count：
ESI Highly Cited Papers on the List： 0 Unfold All
WanFang Cited Count：
Chinese Cited Count：
30 Days PV： 11
Affiliated Colleges：
