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Author:

Tiechuan, Zuo (Tiechuan, Zuo.) | Jimin, Chen (Jimin, Chen.) (Scholars:陈继民)

Indexed by:

EI Scopus

Abstract:

In 1995 the National Center of Laser Technology (NCLT) of China was opened. From that time there has been research on laser microfabrication at NCLT. Under the support of the National Science Foundation and Beijing Science Foundation several projects involving laser micro processing have been carried out. NCLT has make great progress in the field of laser micro processing with excimer laser and powder microsintering using YAG laser. Based on the principle of excimer laser micromachining, a micromachining system, including a beam delivery system, mask illumination system based on fly's eye homogenizer, double telecentric optical and electrical system, has been developed. The application of micromachining technology to the fabrication of MEMS has been conducted and 50~500 μm diameter micro-gears have been made using polymers and ceramics. Meanwhile the excimer laser has been to manufacture microfluid biochip. Besides this the microfabrication using laser sintering powder material has been investigated at NCLT. This represents the one aspect of the development of laser microprocessing in China.

Keyword:

Excimer lasers Laser materials processing Microfabrication Sintering MEMS Yttrium aluminum garnet Biochips Micromachining Microanalysis Laser heating

Author Community:

  • [ 1 ] [Tiechuan, Zuo]National Center of Laser Technology, Beijing University of Technology, Beijing,100022, China
  • [ 2 ] [Jimin, Chen]National Center of Laser Technology, Beijing University of Technology, Beijing,100022, China

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Year: 2004

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 13

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