The　electron　beam　could　be　controlled　by　magnetic　field　for　fast　deflection,　in　which　way　multi-beam　could　be　produced　by　deflection　technique.　The　multi-beams　run　simultaneously　for　material　processing　with　different　heat　input　and　positions.　Therefore,　it　is　possible　to　adjust　the　thermal　effects　and　optimize　the　process.　In　this　paper,　the　generation　of　multi-beams　in　electron　beam　welding　(EBW)　was　investigated,　and　the　processes　of　EBW　with　multi-beams　were　also　investigated　by　both　the　numerical　simulation　methods,　i.e.,　finite　element　analysis　(FEA),　and　the　experiments.　The　result　shows　that　the　residual　stress　of　EBW　could　be　minimized　by　using　the　multiple　beam　technique,　and　at　the　same　time　the　welding　deformation　could　also　be　reduced　with　the　optimized　parameters.　©　2008　Higher　Education　Press.