To　study　the　factors　affecting　ultrasonic　amplitude　imaging　of　porous　silicon　oxide　nano-films　based　on　atomic　force　acoustic　microscopy　(AFAM)　technology.　The　AFAM　system　was　built,　the　silicon　oxide　and　porous　silicon　oxide　nano-films　were　detected,　and　the　first　two　order　contact　resonance　frequency　and　ultrasonic　amplitude　images　were　obtained.　The　influence　of　the　parameters　including　excitation　frequency　and　scanning　frequency　in　the　process　of　test　on　the　stability　and　the　influence　of　ultrasonic　excitation　on　nano-friction　were　analyzed.　Results　show　that　the　ultrasonic　amplitude　images　are　affected　by　excitation　frequency　and　the　ultrasonic　excitation　can　reduce　the　friction　in　the　scanning　process.　©　2018,　Editorial　Department　of　Journal　of　Beijing　University　of　Technology.　All　right　reserved.