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Author:

Li, Y. (Li, Y..) (Scholars:李悦) | Guo, X. (Guo, X..) | Guan, B. (Guan, B..) | Chuai, D. (Chuai, D..) | Shen, G. (Shen, G..)

Indexed by:

Scopus PKU CSCD

Abstract:

A high efficient AlGaInP light emitting diode (LED) with omni-directional reflector (ODR) fabricated by Au/Au direct wafer bonding was proposed, in which Si was used as transfer substrate, and tin doped indium oxide(ITO) was used as window layer and buffer layer. By using Au/Au as bonding interface, we removed the GaAs substrate of the AlGalnP wafer and successfully bonded it to Si substrate under the pressure of 0.35 mPa, temperature of 260°C. On the microscope and scanning electron microscope (SEM) pictures, the bonding structure is complete and no crack on the interface, and the ODR structure is protected. Comparing with conventional GaAs absorbing substrate LED, the forward voltage is 80% lower and the output power and luminous efficiency is 1.5 and 2.1 times higher respectively.

Keyword:

AlGalnP; Direct wafer bonding; Light emitting diode (LED); Omni-directional reflector; Si substrate; Tin doped Indium Oxide (ITO)

Author Community:

  • [ 1 ] [Li, Y.]Optoelectronic Lab., Beijing University of Technology, Beijing 100124, China
  • [ 2 ] [Guo, X.]Optoelectronic Lab., Beijing University of Technology, Beijing 100124, China
  • [ 3 ] [Guan, B.]Optoelectronic Lab., Beijing University of Technology, Beijing 100124, China
  • [ 4 ] [Chuai, D.]Optoelectronic Lab., Beijing University of Technology, Beijing 100124, China
  • [ 5 ] [Shen, G.]Optoelectronic Lab., Beijing University of Technology, Beijing 100124, China

Reprint Author's Address:

  • 郭霞

    [Guo, X.]Optoelectronic Lab., Beijing University of Technology, Beijing 100124, China

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Source :

Research and Progress of Solid State Electronics

ISSN: 1000-3819

Year: 2009

Issue: 3

Volume: 29

Page: 399-402,449

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 8

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