Using　anodized　pure　aluminum,　3102　aluminum　alloy　and　6061　aluminum　alloy　as　the　templates,　TiO2　thin　films　were　prepared　through　a　liquid　deposition　method.　The　TiO2　nanotubes　fabricated　on　the　3102　aluminum　alloy　substrate　had　one-dimensional　tubular　structures,　similar　to　that　obtained　on　pure　aluminum　substrate,　whereas　that　prepared　on　the　6061　aluminum　alloy　substrate　had　bamboo-like　structure　with　holes.　It　was　found　that　the　growth　of　TiO2　nanotubes　or　nanorods　was　correlated　with　AAO　templates.　The　morphology　control　and　morphology　transformation　mechanism　were　discussed.　The　results　showed　that　the　deposition　temperature　in　the　range　of　30-40°C　was　favorable　for　the　formation　of　TiO2　nanoarrays.　The　photocatalytic　capability　of　the　TiO2　films　prepared　on　the　aluminum　alloy　is　superior　to　that　of　the　films　fabricated　on　the　pure　aluminum.　The　main　alloying　elements　Si　was　doped　into　TiO2　lattice　to　form　Ti-O-Si　bonds,　resulting　in　the　enhanced　photocatalytic　activity.　©　2016　The　American　Ceramic　Society.　All　rights　reserved.