Effect of velocity slip on performance of the aerostatic guideway in micro-scale - Details

Author：

Chen, D.-J. (Chen, D.-J..) (Scholars：陈东菊) | Zhou, S. (Zhou, S..) | Dong, L.-H. (Dong, L.-H..) | Fan, J.-W. (Fan, J.-W..) (Scholars：范晋伟)

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Abstract：

The　velocity　slip　calculation　method　which　reflects　the　rarefied　effect　was　introduced　to　the　Naiver-stokes　equation　for　interpreting　the　characteristics　of　aerostatic　guideway　gas　film　clearance　in　micro-scale.　The　Reynolds　equation　indicating　the　flow　characteristics　of　gas　film　was　derived.　The　pressure　distribution　of　the　gas　film　was　simulated.　The　variation　rules　of　the　stiffness　of　the　gas　film　were　calculated　with　the　pressure　distribution.　This　was　verified　by　experiments　indirectly　and　agreeds　with　the　analysis　results.　©　2015,　Beijing　University　of　Technology.　All　right　reserved.

Keyword：

Aerostatic guideway; Gas film thickness; Load capacity; Micro-scale; Stiffness

Author Community：

[ 1 ] [Chen, D.-J.]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, 100124, China
[ 2 ] [Zhou, S.]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, 100124, China
[ 3 ] [Dong, L.-H.]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, 100124, China
[ 4 ] [Fan, J.-W.]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, 100124, China

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Source ：

Journal of Beijing University of Technology

ISSN： 0254-0037

Year： 2015

Issue： 11

Volume： 41

Page： 1688-1692

Cited Count：

WoS CC Cited Count：

SCOPUS Cited Count： 1

ESI Highly Cited Papers on the List： 0 Unfold All

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30 Days PV： 5

Affiliated Colleges：

材料科学与工程学院本学院/部未明确归属的数据

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