This　paper　presents　a　topological　layout　and　benchmark　that　enables　the　systematic　performance　comparison　between　V-　and　Z-shaped　electrothermal　micro-actuators.　A　common　analytical　model　of　both　V-　and　Z-shaped　micro-actuators　operating　in　vacuum　conditions　is　established　and　verified　by　finite-element　analysis　and　experimental　results.　Based　on　the　analytical　model　and　the　proposed　topological　layout　and　benchmark,　the　performance　of　V-　and　Z-shaped　actuators　is　compared　in　terms　of　output　displacement　and　force　with　varying　structural　parameters,　which　provides　a　reliable　and　practical　guidance　on　the　reasonabe　selection,　systematic　design,　and　analysis　of　the　V-　and　Z-shaped　electrothermal　micro-actuators.　©　2015,　Beijing　University　of　Technology.　All　right　reserved.