This　paper　presents　a　novel　analytical　model　that　provides　a　unique　guidance　on　the　design　comparison　and　estimation　of　V-　and　Z-shaped　electrothermal　microactuators.　A　common　analytical　model　for　both　V-　and　Z-shaped　actuators　is　developed　for　the　first　time　in　this　work　using　the　proposed　topological　structure　layout.　The　developed　model　is　verified　with　finite-element　(FE)　simulation　results　using　commercialized　software　ANSYS　and　with　reported　experimental　results.　Finally　by　virtue　of　the　benchmark　and　the　system　model,　systematic　performance　comparison　with　varying　parameters　of　V-　and　Z-shaped　actuators　are　conducted　to　provide　the　essential　insights　into　the　design　analysis　and　selection　of　V-　and　Z-　shaped　eletrothermal　microactuators.　©　2015　IEEE.