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Abstract:
采用电流斜坡法测试了4种不同金属化样品,其n值分别为:2.29(Al-Si合金膜),1.25(Al-Si-Cu合金膜),1.28(Al-Si/Ti双层金属化),1.23(Al/TiWTi/Al多层金属化).结果表明,n值与材料有关,电迁徙阻力越高n值越小,与BLACK方程相符。同时,考察了不同温度和不同电流上升斜率对n值测量结果的影响,试验表明,在相当宽的温度范围和测试时间内获得的n值一致性很好。
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Source :
北京工业大学学报
Year: 1996
Issue: 04
Page: 31-36
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 8
Affiliated Colleges: