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Author:

Li, Zhiwei (Li, Zhiwei.) | Zhang, Zhengfeng (Zhang, Zhengfeng.) | Tian, Jiamin (Tian, Jiamin.) | Wu, Gongtao (Wu, Gongtao.) | He, Yidan (He, Yidan.) | Yu, Bocheng (Yu, Bocheng.) | Zhan, Fangyuan (Zhan, Fangyuan.) | Wang, Yuwei (Wang, Yuwei.) | Sun, Mei (Sun, Mei.) | Yang, Wei (Yang, Wei.) | Li, Zhihong (Li, Zhihong.) | Chen, Qing (Chen, Qing.) | Yan, Pengfei (Yan, Pengfei.) | Wei, Xianlong (Wei, Xianlong.)

Indexed by:

EI Scopus SCIE

Abstract:

We report a tunneling diode enabling efficient and dense electron emission from SiO2 with low poisoning sensitivity. Benefiting from the shallow SiO2 channel exposed to vacuum and the low electron affinity of SiO2 (0.9 eV), hot electrons tunneling into the SiO2 channel from the cathode of the diode are efficiently emitted into vacuum with much less restriction in both space and energy than those in previous tunneling electron sources. Monte Carlo simulations on the device performance show an emission efficiency as high as 87.0% and an emission density up to 3.0 X 10(5) A/cm(2). By construction of a tunneling diode based on Si conducting filaments in electroformed SiO2, an emission efficiency up to 83.7% and an emission density up to 4.4 X 10(5) A/cm(2) are experimentally realized. Electron emission from the devices is demonstrated to be independent of vacuum pressure from 10(-4) to 10(-1) Pa without poisoning.

Keyword:

tunneling diode Monte Carlo simulation electron source silicon oxide Electron emission

Author Community:

  • [ 1 ] [Li, Zhiwei]Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
  • [ 2 ] [Tian, Jiamin]Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
  • [ 3 ] [Wu, Gongtao]Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
  • [ 4 ] [He, Yidan]Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
  • [ 5 ] [Zhan, Fangyuan]Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
  • [ 6 ] [Wang, Yuwei]Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
  • [ 7 ] [Sun, Mei]Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
  • [ 8 ] [Yang, Wei]Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
  • [ 9 ] [Chen, Qing]Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
  • [ 10 ] [Wei, Xianlong]Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
  • [ 11 ] [Zhang, Zhengfeng]Beijing Univ Technol, Fac Mat & Mfg, Beijing Key Lab Microstruct & Property Solids, Beijing 100124, Peoples R China
  • [ 12 ] [Yan, Pengfei]Beijing Univ Technol, Fac Mat & Mfg, Beijing Key Lab Microstruct & Property Solids, Beijing 100124, Peoples R China
  • [ 13 ] [Yu, Bocheng]Peking Univ, Sch Integrated Circuits, Natl Key Lab Nano Micro Fabricat Technol, Beijing 100871, Peoples R China
  • [ 14 ] [Li, Zhihong]Peking Univ, Sch Integrated Circuits, Natl Key Lab Nano Micro Fabricat Technol, Beijing 100871, Peoples R China

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Source :

NANO LETTERS

ISSN: 1530-6984

Year: 2022

Issue: 3

Volume: 22

Page: 1270-1277

1 0 . 8

JCR@2022

1 0 . 8 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:41

JCR Journal Grade:1

CAS Journal Grade:1

Cited Count:

WoS CC Cited Count: 11

SCOPUS Cited Count: 14

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 3

Affiliated Colleges:

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