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Abstract:
Monoclinic gallium oxide (bGa2O3 ) is an emerging wide bandgap semiconductor with an ultrawide bandgap (~ 4. 9 eV) at room temperature, an high breakdown field strength (~8 MV/ cm), a Baligas figure of merit (BFOM) of 3 400, and availability of native single crystal substrates using inexpensive meltbased growth methods. These attractive properties of bGa2 O3 make it an ideal candidate for potential applications such as highpower electronic devices and solar blind ultraviolet (UV) photodetectors. It is well known that the high quality epitaxial layer is the prerequisite for the fabrication of high performance devices. Up to now, the bGa2 O3 epitaxial layers have been prepared by various methods, and several kinds of devices have been fabricated. However, many challenges still exist, including heteroepitaxial growth maturity, ptype doping, and device performance optimization. This article reviews the current status of the synthesis technologies, the substrates for homoepitaxy / heteroepitaxy, doping, electrical properties and the applications of power devices and ultraviolet photodetectors. © 2022 Cailiao Daobaoshe/ Materials Review. All rights reserved.
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Materials Reports
ISSN: 1005-023X
Year: 2022
Issue: 13
Volume: 36
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WoS CC Cited Count: 0
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 7
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