• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

Sun, Y. (Sun, Y..) | Feng, Y. (Feng, Y..) | Wei, J. (Wei, J..) | Wang, M. (Wang, M..) | Yang, X. (Yang, X..) | Mei, W. (Mei, W..) | Yang, Y. (Yang, Y..) | Shen, B. (Shen, B..)

Indexed by:

EI Scopus SCIE

Abstract:

In this letter, vertically conductive GaN epilayer on SiC substrate was achieved without the typically used conductive buffer layer. Here, in order to reduce the impacts of band offset of different layers on vertical conductivity and improve the vertical carrier transportation, an ultrathin AlGaN buffer layer was employed to replace the thick conductive buffer layer. Fully-vertical Schottky barrier diode (SBD) based on this vertically conductive epi-stack demonstrated a much lower specific on-resistance of 0.84 mΩ·cm2 with superior thermal stability. Moreover, the SBD also exhibited an on/off ratio of ∼5 × 109 and a nearly unity ideality factor of 1.08. This approach lays the foundation for the heterogeneous integration of GaN/SiC based devices. © 2024 IOP Publishing Ltd.

Keyword:

fully-vertical Schottky barrier diode GaN-on-SiC ultrathin buffer layer

Author Community:

  • [ 1 ] [Sun Y.]The Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Ministry of Education, Beijing, 100124, China
  • [ 2 ] [Feng Y.]The Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Ministry of Education, Beijing, 100124, China
  • [ 3 ] [Wei J.]The Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Ministry of Education, Beijing, 100124, China
  • [ 4 ] [Wang M.]Institute of Microelectronics, Peking University, Beijing, 100871, China
  • [ 5 ] [Yang X.]School of Physics, Peking University, Beijing, 100871, China
  • [ 6 ] [Mei W.]The Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Ministry of Education, Beijing, 100124, China
  • [ 7 ] [Yang Y.]The Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Ministry of Education, Beijing, 100124, China
  • [ 8 ] [Shen B.]School of Physics, Peking University, Beijing, 100871, China

Reprint Author's Address:

Email:

Show more details

Related Keywords:

Related Article:

Source :

Semiconductor Science and Technology

ISSN: 0268-1242

Year: 2024

Issue: 2

Volume: 39

1 . 9 0 0

JCR@2022

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 17

Affiliated Colleges:

Online/Total:678/10675492
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.