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Author:

Hu, Yan (Hu, Yan.) | Ji, Lingfei (Ji, Lingfei.) (Scholars:季凌飞) | Li, Jian (Li, Jian.) | Bao, Yong (Bao, Yong.) | Yan, Yinzhou (Yan, Yinzhou.) (Scholars:闫胤洲) | Jiang, Yijian (Jiang, Yijian.) (Scholars:蒋毅坚)

Indexed by:

EI Scopus PKU CSCD

Abstract:

In this paper, picosecond laser drilling of quartz glass is studied. The 532 nm picosecond laser induced ablation threshold of quartz glass is explored and the basic parameters of the picosecond laser processing of glass, including the laser power, repetition rate and processing time, are investigated. From the study, the ablation threshold of quartz glass at picosecond pulse width is concluded to be around 2.01 J/cm2. It is found that the diameter and depth of the holes drilled in quartz glass are proportional to the laser fluence and processing time, but the rate of increase levels off finally. Meanwhile the laser repetition rate also has an important influence on the machining quality. Picosecond laser crack-free processing of quartz glass is achieved by optimizing the laser parameters based on the ablation threshold and the processing rules obtained in our research.

Keyword:

Quartz Micromachining Picosecond lasers Glass Laser beam effects Ablation Infill drilling

Author Community:

  • [ 1 ] [Hu, Yan]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 2 ] [Ji, Lingfei]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 3 ] [Li, Jian]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 4 ] [Bao, Yong]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 5 ] [Yan, Yinzhou]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 6 ] [Jiang, Yijian]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China

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Source :

Chinese Journal of Lasers

ISSN: 0258-7025

Year: 2013

Issue: SUPPL

Volume: 40

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 9

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