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Author:

Ren, Zhexuan (Ren, Zhexuan.) | An, Xia (An, Xia.) | Wang, Jianing (Wang, Jianing.) | Li, Gensong (Li, Gensong.) | Zhang, Xingyao (Zhang, Xingyao.) | Zhang, Xing (Zhang, Xing.) | Huang, Ru (Huang, Ru.)

Indexed by:

CPCI-S EI Scopus SCIE

Abstract:

The interface quality between the gate dielectric and germanium (Ge) channel plays a crucial role for Ge MOSFETs. The impact of different interface passivation techniques on the total ionizing dose (TID) effect of Ge pMOSFET with enclosed-layout and Al2O3/TiN gate-stack is experimentally investigated under different bias conditions. The N-passivation and O-passivation of Ge pMOSFETs are realized by nitrogen-plasma-passivation (NPP) and rapid-thermal-oxidation, respectively. Negative threshold voltage (Vth) shift and positive Vth shift are observed for devices irradiated under on-state and TG-state, respectively, which are partially due to negative bias temperature instability (NBTI) and positive bias temperature instability (PBTI) stresses. The NBTI and PBTI effects are evaluated to obtain "pure" Vth shifts induced by TID irradiation. The O-passivated Ge pMOSFETs show larger pure radiation-induced Vth shifts than N-passivated devices, which is attributed to less irradiation-induced border trap density in the N-based interfacial layer (IL) than the O-based IL. Therefore, N-based IL is more suitable for Ge MOSFET than the O-based IL from a perspective of radiation hardness. The results may provide interface material-design guideline for radiation-hardened and high-performance Ge MOSFET fabrication.

Keyword:

threshold voltage (V-th) shift Bias temperature instability (BTI) total ionizing dose (TID) interface passivation nitrogen-plasma-passivation (NPP) rapid-thermal-oxidation (RTO) Ge pMOS

Author Community:

  • [ 1 ] [Ren, Zhexuan]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
  • [ 2 ] [An, Xia]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
  • [ 3 ] [Li, Gensong]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
  • [ 4 ] [Zhang, Xingyao]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
  • [ 5 ] [Huang, Ru]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
  • [ 6 ] [Wang, Jianing]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Zhang, Xing]Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Xinjiang 830011, Peoples R China

Reprint Author's Address:

  • [An, Xia]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China

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Source :

IEEE TRANSACTIONS ON NUCLEAR SCIENCE

ISSN: 0018-9499

Year: 2019

Issue: 7

Volume: 66

Page: 1592-1598

1 . 8 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:123

Cited Count:

WoS CC Cited Count: 2

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 7

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