The　high-tech　industry　has　evolved　to　reflect　the　importance　of　scientific　level　of　a　country　and　lead　the　development　of　new　industries　and　economic　growth,　technical　efficiency　relates　to　an　industry　or　business　viability　and　development　opportunities,　is　an　important　way　able　to　effectively　improve　the　area　or　industrial　economy.　By　using　the　three-stage　DEA　model　which　is　combined　with　SFA　and　selecting　the　data　of　Beijing　high-tech　industry　between　1995　and　2009,　this　paper　gave　the　empirical　study　of　its　technical　efficiency.　The　purpose　of　the　study　is　to　compare　the　difference　of　the　technical　efficiency　after　separating　the　environmental　variables　and　the　statistical　noise.　Meanwhile,　by　analyzing　the　five　industries　within　Beijing　high-tech　industry,　this　article　elaborated　the　present　situation　and　the　problem　of　the　technical　efficiency　of　Beijing　high-tech　industry,　and　then　it　put　forward　the　related　countermeasure　proposal.　Finally,　the　future　research　on　the　technical　efficiency　of　high-tech　industry　was　discussed.　©　2012　IEEE.