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Abstract:
Integration of microfluidics with integrated circuit chip is a promising method to achieve lab-on-a-chip for its high-level miniaturization and portability in application. In this paper, a novel approach for integration of complementary metal- oxide-semiconductor image sensor and microwell array using the 3-D wafer-level chip scale package (3-D WLCSP) technology for biodetector is presented. The key process including silicon microwell array fabricating, wafer-level bonding, backside grinding, through-silicon via etching, redistribution layer, and hall grid array formation are developed. A high-density serpentine electrical circuit is integrated on the backside of the package to work as a temperature controller. After the fabrication process optimization, a yield rate of 94.6% is obtained. The reliability of the packages is characterized by thermal cycling and highly accelerated stress test temperature storage tests, and the results show a good package level reliability. The proposed 3-D WLCSP provides a low-cost and reliable solution for the fluidic biodetector integration.
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IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY
ISSN: 2156-3950
Year: 2019
Issue: 4
Volume: 9
Page: 624-632
2 . 2 0 0
JCR@2022
ESI Discipline: ENGINEERING;
ESI HC Threshold:136
JCR Journal Grade:3
Cited Count:
WoS CC Cited Count: 5
SCOPUS Cited Count: 6
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 5
Affiliated Colleges: