Three-element　in-phase　coherently　coupled　arrays　of　vertical　cavity　surface-emitting　lasers　(VCSELs)　were　fabricated　using　proton　implantation.　The　arrays　show　excellent　beam　quality　with　a　far-field　divergence　of　4　degrees,　while　maintaining　a　stable　in-phase　mode　until　a　maximum　output　power　of　4　mW　under　continuous-wave　condition.　The　process　for　the　arrays　is　simple　and　the　cost　is　low.