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Author:

汤益丹 (汤益丹.) | 沈光地 (沈光地.) | 郭霞 (郭霞.) | 关宝璐 (关宝璐.) | 蒋文静 (蒋文静.) | 韩金茹 (韩金茹.)

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CQVIP PKU CSCD

Abstract:

采用等离子体增强化学气相沉积高低频交替生长法生长了SiO_2/Si_3N_4透明介质分布式:Bragg反射镜(DDBR),提出了对DDBR采用干、湿法并用的腐蚀方法.采用传输矩阵法理论分析了DDBR,得出了为满足出光增益要求的反射率和DDBR结构.使用光致发光(PL)谱仪测量分析了DDBR反射谱和光致发光谱,获得了使光致发光谱辐射增强的DDBR结构,在整个光致发光谱380-780 nm波段,整体辐射增强1.058倍,在谐振波长处辐射增强1.5倍,半峰全宽值由23 nm变窄为10.5nm,获得了很好的光谱纯度.利用最优DDBR结构制成了高性能共振腔发光二极管器件,与普通结构相比,实现了低开启电压...

Keyword:

辐射增强 介质分布式布拉格反射镜 共振腔 发光二极管

Author Community:

  • [ 1 ] 北京工业大学光电子技术省部共建教育部重点实验室

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Source :

物理学报

Year: 2012

Issue: 01

Volume: 61

Page: 504-511

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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