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Abstract:
The (Al0.1Ga0.9)(0.5)In0.5P, four-element alloy, whose band is direct, is used to make optoelectronic devices. The wavelength of the material is about 630nm. When it is epitaxially grown by low press-metalorganic chemical vapor deposition(LP-MOCVD), its quality will depend on temperature, one of the most important conditions. So it is essential to find out the best temperature of growth. The quantum wells of the (Al0.1Ga0.9)(0.5)In0.5P are grown at 700 degrees C, 680 degrees C, 670 degrees C and 660 degrees C respectively. The best temperature, which is found out by the results of photoluminescence PL, is about 670 degrees C. The reasons are given by the results of PL, surfaces of wafers and the flow field simulation of MOCVD. The revaporization of In at high temperature and the incorporation of O at low temperature can lead to bad quality. An available path to solve growth at high temperature is to increase the effective density of In.
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ACTA PHYSICA SINICA
ISSN: 1000-3290
Year: 2013
Issue: 2
Volume: 62
1 . 0 0 0
JCR@2022
ESI Discipline: PHYSICS;
JCR Journal Grade:3
CAS Journal Grade:4
Cited Count:
WoS CC Cited Count: 2
SCOPUS Cited Count: 2
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 4
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