• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

Jie, S. (Jie, S..)

Indexed by:

EI Scopus SCIE

Abstract:

A resist (ma-N 2403 and ZEP 520A7)-based convenient technology to fabricate air bridges on arbitrary substrate is proposed. It involves only two steps of electron-beam lithography. By changing the exposure dose during lithography, the resist can be cross-linked to different extent, and the permanently cross-linked polymer is used for piers. An evaporated 205-nm-thick Ti/Au thin film is used to construct the bridges. Typically, the air bridge is more than 18 mu m long, 2 mu m high, and 5 mu m wide. Due to the accumulated strain in the metal, it naturally forms an arch bridge, rendering no need for critical point drying. The adhesion between the metal and the polymer is considerably strong, even surviving mild sonication. This letter should contribute to a facile technology for manufacturing air bridges for various applications in microelectromechanical systems. [2012-0101]

Keyword:

microelectromechanical systems (MEMS) resist cross-linking microfabrication Air bridge

Author Community:

  • [ 1 ] Beijing Univ Technol, Coll Elect Informat & Control Engn, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

Reprint Author's Address:

  • [Jie, S.]Beijing Univ Technol, Coll Elect Informat & Control Engn, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

Show more details

Related Keywords:

Source :

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

ISSN: 1057-7157

Year: 2012

Issue: 6

Volume: 21

Page: 1285-1287

2 . 7 0 0

JCR@2022

ESI Discipline: ENGINEERING;

JCR Journal Grade:1

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count: 2

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

Online/Total:973/10657666
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.