Traditional　technique　such　nanoindenter(NI)　can＇t　measure　the　local　elastic　modulus　at　nano-scale(lateral).　Atomic　force　acoustic　microscopy　(AFAM)　is　a　dynamic　method,　which　can　quantitatively　determine　indentation　modulus　by　measuring　the　contact　resonance　spectra　for　high　order　modes　of　the　cantilever.　But　there　are　few　reports　on　the　effect　of　experimental　factors,　such　length　of　cantilever,　contact　stiffness　on　measured　value.　For　three　different　samples,　including　copper(Cu)　film　with　110　nm　thickness,　zinc(Zn)　film　of　90　nm　thickness　and　glass　slides,　are　prepared　and　tested,　using　referencing　approach　in　which　measurements　are　performed　on　the　test　and　reference　samples　(it＇s　elastic　modulus　is　known),　and　their　contact　resonance　spectra　are　measured　used　the　AFAM　system　experimentally.　According　to　the　vibration　theory,　from　the　lowest　two　contact　resonance　frequencies,　the　tip-sample　contact　stiffness　is　calculated,　and　then　the　values　for　the　elastic　properties　of　test　sample,　such　as　the　indentation　modulus,　are　determined.　Using　AFAM　system,　the　measured　indentation　modulus　of　copper　nano-film,　zinc　nano-film　and　glass　slides　are　113.53　GPa,　87.92　GPa　and　57.04　GPa,　which　are　agreement　with　literature　values　M　(Cu)　=　105-130　GPa,　M　(Zn)　=　88.44　GPa　and　M　(Glass)　=　50-90　GPa.　Furthermore,　the　sensitivity　of　contact　resonance　frequency　to　contact　stiffness　is　analyzed　theoretically.　The　results　show　that　for　the　cantilevers　with　the　length　160　mu　m,　225　mu　m　and　520　mu　m　respectively,　when　contact　stiffness　increases　from　400　N/m　to　600　N/m,　the　increments　of　first　contact　resonance　frequency　are　126　kHz,　93　kHz　and　0.6　kHz,　which　show　that　the　sensitivity　of　the　contact　resonance　frequency　to　the　contact　stiffness　reduces　with　the　length　of　cantilever　increasing.　The　novel　method　presented　can　characterize　elastic　modulus　of　near　surface　for　nano-film　and　bulk　material,　and　local　elasticity　of　near　surface　can　be　evaluated　by　optimizing　the　experimental　parameters　using　the　AFAM　system.