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Abstract:
从实验上研究了版图尺寸对Si/SiGe HBT高频噪声特性的影响.结果表明,在现有工艺条件下,减少外基区电阻(即减少发射极与基区间距),对降低高频噪声很显著.增加基极条数、增加条长也可减少基极电阻,降低高频噪声.发射极条宽从2μm减少为1μm,对噪声的改善很有限.对1μm或2μm条宽,40μm条长的5个基极条或9个基极条的SiGe HBT,在片测试表明,频率从0.4 GHz增加到1.2 GHz,噪声系数在2.5~4.6 dB之间变化.
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微电子学
ISSN: 1004-3365
Year: 2006
Issue: 5
Volume: 36
Page: 598-600
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count: 6
Chinese Cited Count:
30 Days PV: 10
Affiliated Colleges: