In　this　work,　we　used　a　sol-gel-derived　layer　to　control　the　morphology　and　crystallinity　of　the　fresnoite　thin　films　produced　by　magnetron　sputtering.　Atomic　force　microscope　(AFM)　and　Raman　scattering　spectra　showed　that　the　sol-gel-derived　layer　improves　the　crystallinity　and　morphology　of　the　films　as-sputtered.　Compared　to　the　film　without　the　layer　which　gives　a　blur　image　of　grains,　fresnoite　film　with　the　layer　presented　sharp　boundaries　and　distinct　shapes,　which　is　referred　to　the　imprint　of　the　layer＇s　structure.　Meanwhile,　the　difference　in　X-ray　diffraction　patterns　and　Raman　spectra　showed　the　different　crystallinity　of　the　films　with　or　without　the　layer.　It　is　suggested　that　the　nanocrystalline　layer　fabricated　by　sol-gel　method　provides　the　nucleation　site,　and　lower　the　energy　barrier　of　the　crystal　growth　in　the　sputtering　of　the　thin　films,　thus　making　the　thin　films　sputtered　onto　it　with　developed　grains　and　the　structural　aspect　of　the　layer.　(c)　2005　Elsevier　B.V.　All　rights　reserved.