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Author:

Chen, Runze (Chen, Runze.) | Wang, Lixin (Wang, Lixin.) | Jiu, Naixia (Jiu, Naixia.) | Zhang, Hongkai (Zhang, Hongkai.) | Guo, Min (Guo, Min.)

Indexed by:

Scopus SCIE

Abstract:

In this paper, a split-gate resurf stepped oxide with double floating electrodes (DFSGRSO) U-shape metal oxide semiconductor field-effect transistor (UMOSFET) is proposed. The floating electrodes are symmetrically distributed on both sides of the source electrode in the trench. The performance of the DFSGRSO UMOSFET with different size of floating electrodes is simulated and analyzed. The simulation results reveal that the floating electrodes can modulate the distribution of the electric field in the drift area, improving the performance of the device significantly. The breakdown voltage (BV) and figure of merit (FOM) of the DFSGRSO UMOSFET at optimal parameters are 23.6% and 53.1% higher than that of the conventional structure. In addition, the regulatory mechanism of the floating electrodes is analyzed. The electric field moves from the bottom of the trench to the middle of the drift area, which brings a new electric field peak. Therefore, the distribution of the electric field is more uniform for the DFSGRSO UMOSFET compared with the conventional structure.

Keyword:

floating electrode electric field modulation power UMOSFET split gate

Author Community:

  • [ 1 ] [Chen, Runze]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 2 ] [Wang, Lixin]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 3 ] [Jiu, Naixia]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 4 ] [Zhang, Hongkai]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 5 ] [Guo, Min]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 6 ] [Chen, Runze]Univ Chinese Acad Sci, Sch Microelect, Beijing 100049, Peoples R China
  • [ 7 ] [Wang, Lixin]Univ Chinese Acad Sci, Sch Microelect, Beijing 100049, Peoples R China
  • [ 8 ] [Jiu, Naixia]Univ Chinese Acad Sci, Sch Microelect, Beijing 100049, Peoples R China
  • [ 9 ] [Zhang, Hongkai]Univ Chinese Acad Sci, Sch Microelect, Beijing 100049, Peoples R China
  • [ 10 ] [Guo, Min]Beijing Univ Technol, Fac Informat Technol, Coll Elect Sci & Technol, Beijing 100124, Peoples R China

Reprint Author's Address:

  • [Wang, Lixin]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China;;[Wang, Lixin]Univ Chinese Acad Sci, Sch Microelect, Beijing 100049, Peoples R China

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Related Keywords:

Source :

ELECTRONICS

Year: 2020

Issue: 5

Volume: 9

2 . 9 0 0

JCR@2022

ESI Discipline: ENGINEERING;

ESI HC Threshold:115

Cited Count:

WoS CC Cited Count: 2

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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