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Abstract:
In this paper, a low-loss ridge waveguide based on the thin film lithium niobate (TFLN) is successfully fabricated using a proton-exchanged wet etching (PEWE) technique, which can result in a much better vertical sidewall angle and improve the surface roughness to reduce the scattering loss. The average etching rate is obviously improved by the structural defects and phase transition induced by our modified PE process, and the finally optimized etching rate is as fast as 13.5 nm/min. The propagation loss of the fabricated straight ridge waveguide is measured to be 4.3 dB/cm by using an 850 nm single mode laser as the light source. Meanwhile, a Y-branch waveguide is also measured with a uniform light splitting ratio of nearly 1:1. Furthermore, this work offers the route for the manufacturing of low-cost and high-efficiency photonic integration platform.
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Source :
OPTICAL MATERIALS
ISSN: 0925-3467
Year: 2021
Volume: 120
3 . 9 0 0
JCR@2022
ESI Discipline: MATERIALS SCIENCE;
ESI HC Threshold:116
JCR Journal Grade:2
Cited Count:
WoS CC Cited Count: 9
SCOPUS Cited Count: 10
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 4
Affiliated Colleges: