In　order　to　study　the　influence　mechanism　of　the　motion　accuracy　of　the　air　static　pressure　guide　system,　this　article　combines　the　internal　transmission　law　of　the　driving　part　of　the　table　and　the　coupling　analysis　of　solid　damping　and　micro-scale　gas　damping　and　establishes　the　stepping　motor,　ball　screw,　nut,　and　motion　table.　The　four-degree-of-freedom　operation　model　was　used　to　study　the　response　simulation　and　dynamic　characteristics　of　the　entire　table　under　the　influence　of　various　components.　Combined　with　the　damping　characteristics　extracted　from　the　experiment,　the　influence　mechanism　of　micro-gap　solids　and　gas　damping　on　the　motion　accuracy　of　the　air-floating　table　is　analyzed,　and　the　optimal　structural　scheme　that　can　effectively　improve　the　accuracy　and　stability　is　proposed　to　improve　the　performance　of　the　air-floating　table　and　ultra-precision　machine　tools,　processing　accuracy　to　solve　key　technical　problems　in　improving　nano-machining　accuracy.