Purpose　The　purpose　of　this　study　is　to　investigate　the　coupling　effects　of　the　velocity　slip,　rarefaction　effect　and　effective　viscosity　of　the　gas　film　on　the　performance　of　the　aerostatic　guideway　in　micro-scale　and　improve　the　analysis　precision　of　the　static　performance　of　aerostatic　guideway.　Design/methodology/approach　The　corresponding　model　of　the　gas　film　flow　with　consideration　of　the　velocity　slip,　rarefaction　effect　and　effective　viscosity　of　the　gas　film　in　micro-scale　is　proposed.　By　solving　the　corresponding　model,　the　bearing　capacity　and　the　stiffness　of　the　aerostatic　guideway　are　obtained　through　the　pressure　distributions　of　the　air　cavity.　Through　comparing　the　bearing　capacity　and　the　stiffness　in　different　situations,　the　couple　effects　of　the　three　factors　are　analyzed.　Finally,　the　experimental　results　about　the　stiffness　are　obtained　and　the　contrast　between　the　simulation　stiffness　and　the　tested　stiffness　is　achieved.　Findings　Through　comparing　the　coupling　effects　of　the　micro　scale　factors　under　different　conditions　on　the　performance　of　the　aerostatic　guideway,　it　was　found　that　when　comparing　the　effects　of　a　single　factor,　the　effect　of　the　first-order　slip　is　the　largest.　When　two　factors　are　randomly　combined,　velocity　slip　and　viscosity　of　the　gas　film　is　the　largest,　but　these　coupling　effects　are　less　than　the　effect　of　considering　three　factors　simultaneously.　Originality/value　It　is　essential　to　consider　the　first-order　velocity　slip,　the　flow　factor　Q　and　the　effective　viscosity　when　analyzing　the　static　performance　of　the　aerostatic　guideway　in　micro-scale.　This　makes　studying　the　performance　of　the　aerostatic　guideway　in　micro-scale　feasible　and　improves　the　machine＇s　accuracy.