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Author:

Wang, Di (Wang, Di.) | Ma, Xiaochen (Ma, Xiaochen.) | Chen, Rongrong (Chen, Rongrong.) | Le, Yong (Le, Yong.) | Zhang, Biao (Zhang, Biao.) | Xiao, Hongdi (Xiao, Hongdi.) | Luan, Caina (Luan, Caina.) | Ma, Jin (Ma, Jin.)

Indexed by:

EI Scopus SCIE

Abstract:

Ta-doped Ga2O3 (Ga2O3:Ta) epitaxial films were grown on SrTiO3 (100) substrates via an MOCVD system. Solar blind ultraviolet (UV) detectors with a metal-semiconductor-metal structure were fabricated based on the beta-Ga2O3:Ta films, and the effects of Ta doping concentration on the photo response were investigated. The surface morphology, composition and band gap of the films were characterized. The beta-Ga2O3:Ta UV detectors showed photo response characteristics under 222 nm deep UV light. As the Ta doping concentration increased, the responsivity of the detector increased significantly. For the 1.5 at.% Ta doped UV detector, the responsivity under 222 nm UV light at 8 V bias reached 8.23 A W-1, and the light-dark current ratio is close to 10(3). Moreover, the responsive rise time (T-r1/T-r2) and decay time (T-d1/T-d2) at 1 V bias were as short as 0.37 s/0.38 s and 0.41s/0.85 s, respectively. Ta doping significantly improves the performance of beta-Ga2O3 ultraviolet detectors, which may be a feasible method to expand its application potential.

Keyword:

Ultraviolet detector beta-Ga2O3 Doping Epitaxial film Metal-semiconductor-metal structure

Author Community:

  • [ 1 ] [Wang, Di]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 2 ] [Chen, Rongrong]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 3 ] [Le, Yong]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 4 ] [Zhang, Biao]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 5 ] [Xiao, Hongdi]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 6 ] [Luan, Caina]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 7 ] [Ma, Jin]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 8 ] [Ma, Xiaochen]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

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Source :

OPTICAL MATERIALS

ISSN: 0925-3467

Year: 2022

Volume: 129

3 . 9

JCR@2022

3 . 9 0 0

JCR@2022

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:66

JCR Journal Grade:2

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count: 22

SCOPUS Cited Count: 23

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 5

Affiliated Colleges:

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