High　quality　surface　can　be　quickly　obtained　by　laser　polishing　quartz　glass.　With　the　improvement　of　application　requirements　of　quartz　glass,　the　combination　of　process　parameters　for　optimizing　CO2　laser　polishing　large　area　quartz　glass　sheet　is　proposed.　The　untreated　quartz　ground　glass　was　scanned　by　CO2　laser.　Taking　the　roughness　as　the　research　index　value,　the　parameters　affecting　CO2　laser　polishing　were　studied　and　analyzed.　The　transient　model　was　established　by　COMSOL　software　to　simulate　the　polishing　process,　predict　the　combination　of　polishing　parameters,　and　obtain　the　temperature　field　change　in　the　polishing　process　and　the　flow　of　quartz　glass　during　melting.　300W　continuous　CO2　laser　was　used　in　the　experiment.　The　effect　of　surface　improvement　was　the　best　when　the　laser　power　was　300W,　the　scanning　rate　was　100~200mm/s.　The　micro　area　roughness　can　reach　Ra=10.18nm.　Then,　the　chemical　corrosion　was　combined　with　CO2　laser　polishing,　and　the　quartz　glass　was　corroded　by　hydrofluoric　acid　and　sodium　hydroxide　solution,　and　then　polished　to　obtain　the　average　minimum　roughness　Ra=5.63nm.　The　research　results　can　be　put　into　practical　industrial　production,　which　is　conducive　to　improving　production　efficiency　and　promote　the　development　of　laser　polishing　quartz　glass　technology.　©　2022　Institute　of　Physics　Publishing.　All　rights　reserved.