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Author:

Lin, Zhenyuan (Lin, Zhenyuan.) | Ji, Lingfei (Ji, Lingfei.) (Scholars:季凌飞) | Hong, Minghui (Hong, Minghui.)

Indexed by:

EI Scopus SCIE

Abstract:

Nanogrooves with a minimum feature size down to 30 nm (lambda/26) can be formed directly on silicon surface by irradiation from two orthogonal polarized 1064 nm/10 ns fiber laser beams. The creation of such small nanogrooves is attributed to surface thermal stress during resolidification and supercooling with the double laser beams' irradiation. By varying the pulse number and laser fluence, the feature size of narrow grooves on silicon surface can be tuned. The experimental results and numerical calculation of surface thermal behaviors indicated that the high repetition rate of the nanosecond laser leads to the incubation effect and different silicon optical and thermal properties during laser irradiation. Resolution on this scale should be attractive in nanolithography, particularly considering that this method is available in far field and in ambient air.

Keyword:

thermal stress nanocreation nanosecond laser silicon

Author Community:

  • [ 1 ] [Lin, Zhenyuan]Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
  • [ 2 ] [Hong, Minghui]Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
  • [ 3 ] [Hong, Minghui]Xiamen Univ, Sch Aerosp Engn, Xiamen 361005, Peoples R China
  • [ 4 ] [Ji, Lingfei]Beijing Univ Technol, Inst Laser Engn, Fac Mat & Mfg, Beijing 100124, Peoples R China
  • [ 5 ] [Ji, Lingfei]Minist Educ, Key Lab Transscale Laser Mfg Technol, Beijing 100124, Peoples R China

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Source :

NANO LETTERS

ISSN: 1530-6984

Year: 2022

Issue: 17

Volume: 22

Page: 7005-7010

1 0 . 8

JCR@2022

1 0 . 8 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:41

JCR Journal Grade:1

CAS Journal Grade:1

Cited Count:

WoS CC Cited Count: 19

SCOPUS Cited Count: 21

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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