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Author:

Jia, Hui (Jia, Hui.) | Yang, Junjie (Yang, Junjie.) | Tang, Mingchu (Tang, Mingchu.) | Li, Wei (Li, Wei.) | Jurczak, Pamela (Jurczak, Pamela.) | Yu, Xuezhe (Yu, Xuezhe.) | Zhou, Taojie (Zhou, Taojie.) | Park, Jae-Seong (Park, Jae-Seong.) | Li, Keshuang (Li, Keshuang.) | Deng, Huiwen (Deng, Huiwen.) | Yu, Xueying (Yu, Xueying.) | Li, Ang (Li, Ang.) | Chen, Siming (Chen, Siming.) | Seeds, Alwyn (Seeds, Alwyn.) | Liu, Huiyun (Liu, Huiyun.)

Indexed by:

EI Scopus SCIE

Abstract:

In this work, we investigate the epitaxial growth of InAs quantum dots (QDs) on Ge substrates. By varying the growth parameters of growth temperature, deposition thickness and the growth rate of InAs, high density (1.2 x 10(11) cm(-2)) self-assembled InAs QDs were successfully epitaxially grown on Ge substrates by solid-source molecular beam epitaxy and capped by Ge layers. Pyramid- and polyhedral-shaped InAs QDs embedded in Ge matrices were revealed, which are distinct from the lens- or truncated pyramid-shaped dots in InAs/GaAs or InAs/Si systems. Moreover, with a 200 nm Ge capping layer, one-third of the embedded QDs are found with elliptical and hexagonal nanovoids with sizes of 7-9 nm, which, to the best of our knowledge, is observed for the first time for InAs QDs embedded in a Ge matrix. These results provide a new possibility of integrating InAs QD devices on group-IV platforms for Si photonics.

Keyword:

quantum dots molecular beam epitaxy nanovoids germanium

Author Community:

  • [ 1 ] [Jia, Hui]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 2 ] [Yang, Junjie]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 3 ] [Tang, Mingchu]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 4 ] [Jurczak, Pamela]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 5 ] [Yu, Xuezhe]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 6 ] [Zhou, Taojie]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 7 ] [Park, Jae-Seong]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 8 ] [Li, Keshuang]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 9 ] [Deng, Huiwen]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 10 ] [Yu, Xueying]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 11 ] [Chen, Siming]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 12 ] [Seeds, Alwyn]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 13 ] [Liu, Huiyun]UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
  • [ 14 ] [Li, Wei]Beijing Univ Technol, Inst Microstruct & Properties Adv Mat, Beijing 100124, Peoples R China
  • [ 15 ] [Li, Ang]Beijing Univ Technol, Inst Microstruct & Properties Adv Mat, Beijing 100124, Peoples R China

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Source :

JOURNAL OF PHYSICS D-APPLIED PHYSICS

ISSN: 0022-3727

Year: 2022

Issue: 49

Volume: 55

3 . 4

JCR@2022

3 . 4 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:41

JCR Journal Grade:2

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count: 2

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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