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Recently, hexagonal boron nitride (h-BN), an ultra-wide bandgap semiconductor, has attracted considerable attention owing to its excellent properties. In thin films grown on metal catalysts, contamination and damage induced by a transfer process cannot be avoided. Therefore, synthesizing h-BN films on non-catalytic dielectric substrates is desirable for electronic applications. In this study, we demonstrate the direct growth of high-quality h-BN films with a controllable thickness on sapphire substrates by using the pulsed laser deposition (PLD) technique. The effects of the deposition conditions and laser parameters on the growth of the h-BN films are systematically investigated by evaluating their characteristic Raman peaks. Among the various growth parameters studied, the substrate temperature has the greatest influence on the crystalline quality of the h-BN films, and the optimal pressure varies depending on the target-substrate distance. The h-BN film grown under optimal conditions exhibits a narrow Raman line width of similar to 30 cm(-1), indicating a high crystalline quality. The photodetectors fabricated from the PLD-grown h-BN films exhibit superior deep-ultraviolet detection performance with a large on/offratio of >10(4), high photoresponsivity, and a sharp cut-offwave length of 220 nm. This study presents the possibility of producing high-quality h-BN films by applying PLD on dielectric substrates for optoelectronic applications.
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FUNDAMENTAL RESEARCH
ISSN: 2096-9457
Year: 2021
Issue: 6
Volume: 1
Page: 677-683
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count: 29
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 4
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