• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

Liu, Min (Liu, Min.) | Cai, Ziteng (Cai, Ziteng.) | Liu, Jian (Liu, Jian.) | Wu, Nanjian (Wu, Nanjian.) | Liu, Liyuan (Liu, Liyuan.)

Abstract:

This paper describes a promising route for the exploration and development of 3.0 THz sensing and imaging with FET-based power detectors in a standard 65 nm CMOS process. Based on the plasma-wave theory proposed by Dyakonov and Shur, we designed high-responsivity and low-noise multiple detectors for monitoring a pulse-mode 3.0 THz quantum cascade laser (QCL). Furthermore, we present a fully integrated high-speed 32 x 32-pixel 3.0 THz CMOS image sensor (CIS). The full CIS measures 2.81 x 5.39 mm(2) and achieves a 423 V/W responsivity (Rv) and a 5.3 nW integral noise equivalent power (NEP) at room temperature. In experiments, we demonstrate a testing speed reaching 319 fps under continuous-wave (CW) illumination of a 3.0 THz QCL. The results indicate that our terahertz CIS has excellent potential in cost-effective and commercial THz imaging and material detection.

Keyword:

quantum cascade laser (QCL) CMOS image sensor (CIS) power detectors terahertz

Author Community:

  • [ 1 ] [Liu, Min]Chinese Acad Sci, Inst Semicond, State Key Lab Superlatt & Microstruct, Beijing 100083, Peoples R China
  • [ 2 ] [Cai, Ziteng]Chinese Acad Sci, Inst Semicond, State Key Lab Superlatt & Microstruct, Beijing 100083, Peoples R China
  • [ 3 ] [Liu, Jian]Chinese Acad Sci, Inst Semicond, State Key Lab Superlatt & Microstruct, Beijing 100083, Peoples R China
  • [ 4 ] [Wu, Nanjian]Chinese Acad Sci, Inst Semicond, State Key Lab Superlatt & Microstruct, Beijing 100083, Peoples R China
  • [ 5 ] [Liu, Liyuan]Chinese Acad Sci, Inst Semicond, State Key Lab Superlatt & Microstruct, Beijing 100083, Peoples R China
  • [ 6 ] [Liu, Min]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 7 ] [Liu, Jian]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 8 ] [Wu, Nanjian]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 9 ] [Liu, Liyuan]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 10 ] [Cai, Ziteng]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China

Reprint Author's Address:

Show more details

Related Keywords:

Related Article:

Source :

JOURNAL OF SEMICONDUCTORS

ISSN: 1674-4926

Year: 2023

Issue: 10

Volume: 44

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count: 1

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

Affiliated Colleges:

Online/Total:619/10839566
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.